Google Patents Piezoelectric ceramic driven jet pipe electro-hydraulic servo valveĭownload PDF Info Publication number CN107435667B CN107435667B CN201710681124.4A CN201710681124A CN107435667B CN 107435667 B CN107435667 B CN 107435667B CN 201710681124 A CN201710681124 A CN 201710681124A CN 107435667 B CN107435667 B CN 107435667B Authority CN China Prior art keywords piezoelectric ceramic jet pipe valve fixed pipe Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents CN107435667B - Piezoelectric ceramic driven jet pipe electro-hydraulic servo valve CN107435667B - Piezoelectric ceramic driven jet pipe electro-hydraulic servo valve
